Load Port: Chinese name: wafer loading and unloading machine, wafer loading machine, installed in front of EFEM * (equipment front end module: Equipment Front End Module), used as a window for wafer entry and exit of EFEM; Intelligent and flexible factory interface modules for tool automation; Supporting excellent reliability and ultra clean performance; Maximizing interoperability, seamless interchangeability, and ease of configuration; Compatible with all FOUP and automatic front open shipping boxes (FOSB) delivered manually or through AMHS vehicles that comply with SEMI requirements; Used to maintain the cleanliness of the wafer during transportation. So why is the price of Fuqi's automation equipment relatively high? Because some customers require non-standard customization.

The specific reasons for the relatively high non-standard production price of Load Port are as follows:

1. Non standard automation equipment can be designed according to customer needs to achieve the desired effect and meet various customer requirements within the achievable technical level. Different types of customers have different process requirements. Customized manufacturing takes longer to obtain data, design, develop solutions, purchase materials, produce, and install than standardized automation equipment.

2. Non standard automation equipment places more emphasis on modularity: as each user can customize products according to their different needs. Non standard automation equipment fully demonstrates its superiority in this regard, as it only has one module, which can better utilize its functions.