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Double wishbone Robot (4-6-8)

PRODUCTS > Semiconductor series > Double wishbone Robot (4-6-8)

Double wishbone Robot (4-6-8)

Double wishbone Robot is one of the three major components of EFEM, used as a conveying unit from LP inlet and outlet to PA.

main features 


1. Applicable wafer specifications: 4 inches -6 inches -8 inches;


2. Dual arm transmission method;


3. The wafer fixing methods include vacuum adsorption, lower support, and edge clamping, with optional methods available;


4. The fork can be made of ceramic, carbon fiber, aluminum alloy, and other materials to choose from;


5. Control adopts positive motion control mode;


6. Modular design, compatible with various machine configurations;


7. Additional running axes can be added as needed;


8. Automatic Mapping function can be added to the fork;


9. Operation safety protection alarm;


10. Closed working environment;


11. Passed SEMI S2 certification;


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