Pre aligner: Chinese name: Visual Edge Finder, wafer pre positioning system visual version, wafer calibrator. This device achieves high-precision and efficient pre positioning of the center and flat edges (notches) of 6-12 inch wafer wafers, serving the transportation and handling needs of wafer wafers. Our visual edge finder has a centering accuracy of within 01mm, a Notch accuracy of ± 0.35 degrees, and a Flat accuracy of ± 0.35 degrees. It is suitable for transparent, semi transparent, non transparent missing corners, flat edges, polygons, and other crystal wafers.
Main features:
1. Suitable for pre calibration of wafer position in semiconductor production equipment and testing equipment;
2. Non contact pre positioning wafer;
3. Compatible with SEMI standard 150-300mm wafers and transparent wafers (with no hollow center);
4. Compatible with SEMI standard Notch/Flat;
5. Compatible with transparent wafers (Type D);
6. Can locate the center and find the Mark (Flat Edge/Notch) logo;
7. Reading position: 6-12 inches can read the engraving number on the back, and below 6 inches, only the engraving number on the front can be read;
8. Currently, wafers with hollowed out centers are not supported;
9. SEMI S2 certification
Main configuration:
? PC Vision System
The visual edge finding machine from Xiamen Fuqi Automation Equipment Co., Ltd. has its unique functional configuration and characteristics, which can well meet the needs of many factories in implementing interactive operations, and has a large market space.