Fuqi # load port # wafer loading machine # wafer loading and unloading machine

Break the monopoly of foreign technology! The price is less than half of foreign products! The best substitute for imported products!

Obtained SEMI S2 certification!

Load Port: Chinese name: wafer loading and unloading machine, wafer loading machine, installed in front of EFEM * (equipment front end module: Equipment Front End Module), used as a window for wafer entry and exit of EFEM; Intelligent and flexible factory interface modules for tool automation; Supporting excellent reliability and ultra clean performance; Maximizing interoperability, seamless interchangeability, and ease of configuration; Compatible with all FOUP and automatic front open shipping boxes (FOSB) delivered manually or through AMHS vehicles that comply with SEMI requirements; Used to maintain the cleanliness of the wafer during transportation.