Load Port: Chinese name: wafer loading and unloading machine/wafer loading machine. It is an intelligent automation equipment system independently developed by Xiamen Fuqi Automation Equipment Co., Ltd., which helps enterprises with handling and conveying operations.

? Load Port has the following main characteristics:

1. Applicable Cassette Type: 8 "Cassette&12" 25 slot Wafer FOUP/FOSB SEMI E1.9/M31;

2. Mounting standard: SEMI E63;

3. Opener Type: SEMI E62/Front open;

4. Platform height standard (FOUP/FOSB Load Height): SEMI E1.5/E63;

5. Built in protrusion detection;

6. RFID automatic recognition;

7. Operation safety protection alarm;

8. Closed working environment

The main configuration of the ? Load Port:

Platform transfer unit;

Automatic lid opening unit;

RFID reading unit;

Security protection system;

Motion control system;

Modular design.