Wafer pre alignment system/wafer calibrator: English name Pre aligner. It is a set of equipment system independently developed by Xiamen Fuqi Automation Equipment Co., Ltd. This equipment realizes high-precision and efficient pre positioning of the center and flat edges (notches) of 4-12 inch wafer wafers, serving the transportation and handling needs of wafer wafers.
The main configurations of the wafer pre positioning system/wafer calibrator are as follows:
Laser sensor
Built in modular stepper motor, driver, and pulse generator
? Serial port type: USB serial port
Modular design
The wafer pre positioning system/wafer calibrator has the following characteristics:
1. Suitable for pre calibration of wafer position in semiconductor production equipment and testing equipment;
2. Non contact pre positioning wafer;
3. Compatible with SEMI standard 100-300mm wafers and transparent wafers (with no hollow center);
4. Compatible with SEMI standard Notch/Flat;
5. Compatible with transparent wafers (optional);
6. Can locate the center and find the Mark logo;
7. Reading position: 8-12 inches can read the engraving number on the back, and below 6 inches, only the engraving number on the front can be read;
8. Currently, wafers with hollowed out centers are not supported;
9. SEMI S2 certification